Calibration of Nanopositioning Stages
نویسندگان
چکیده
منابع مشابه
Calibration of Nanopositioning Stages
Accuracy is one of the most important criteria for the performance evaluation of microand nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications. However, their positioning accuracy and repeatability are not well known and difficult to guarantee, which induces many drawbacks for many application...
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Article history: Received 29 June 2013 Revised 23 February 2014 Accepted 28 February 2014 Available online xxxx
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ژورنال
عنوان ژورنال: Micromachines
سال: 2015
ISSN: 2072-666X
DOI: 10.3390/mi6121461